Description
Technical Data
| CAS No | 409-21-2 |
| Polytype | 4H |
| Micropipe Density | ≤0.1/c㎡ |
| TSD | ≤200/c㎡ |
| BPD | ≤1000/c㎡ |
| Polytype Areas | None |
| Hex Plates | Cumulative area ≤0.05% |
| Visual Carbon Inclusions | Cumulative area ≤0.05% |
| Dopant | N-Type nitrogen |
| Resistivity | 0.016-0.025ohm.cm |
Items: P-Grade
Crystal parameters
Polytype: 4H
Micropipe Density: s0.1/cm2
Threading Screw Dislocations (TSD): s200/cmZ
Basal Plane Dislocations (BPD): s1000/cm2
Polytype Areas: None
Hex Plates: Cumulative area≤0.05%
Visual Carbon Inclusions: Cumulative areas≤0.05%
Electrical Parameters
Dopant: N-type nitrogen
Resistivity: 0.016-0.025ohm -cm
Mechanical parameters
Diameter: 150.6 土 0.2mm
Billable Height: ≥10mm
Useable Height: 10.0-40.0mm
Primary Flat Orientation: 【1- 100】±5°
Primary Flat Length: 47.5 士 1.5mm
Surface Orientation: { 0001 }± 0.2°
Surface Deflection: 4.0° toward <11-20> ±0.5°
Edge Breakage: None
Cracks: None
Data Sheet