Description
Technical Data
|
Item |
Specification Parameters |
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|
Crystal Orientation |
(100) |
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|
Impurity |
UID |
Sn |
Mg/Fe |
|
Resistivity |
0.1~0.9Ω·cm |
0.01~0.07Ω·cm |
≥10^10Ω·cm |
|
Carrier Concentration |
10^16~10^17 cm^-3 |
~10^18 cm^-3 |
-- |
|
FWHM of X-ray Rocking Curve |
≤150 arc sec |
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|
Dislocation Density |
<1×10^5 cm^-2 |
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|
Dimensions |
A-B |
C-D |
Thickness |
|
|
10.0±0.2mm |
10.5±0.2mm |
0.5(±0.02)mm |
|
Orientation Edge |
Long edge in [010] direction |
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|
Surface |
Single-sided polishing/Double-sided polishing Ra<0.5nm Crystal plane deviation <±1° |
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Data Sheet